Line Scan-Based High-Speed Position Tracking Inside the SEM
نویسندگان
چکیده
منابع مشابه
High Speed High Accuracy Multilateration System Based on Tracking Interferometers
The use of tracking interferometers has gained industrial application for the testing and the calibration of measuring and production machines. The concept is based on sequential multilateration [1] and can realize calibration uncertainties in the sub-micron order. Another application for tracking interferometers is the real-time multilateration for accurate and highly dynamic measurement of 3D...
متن کاملHigh-speed cycloid-scan atomic force microscopy.
A key hurdle in achieving high scan speeds in atomic force microscopes is that the probe is required to be scanned over the sample in a zig-zag raster pattern. The fast axis of the AFM scanner must track a signal that contains frequencies beyond its mechanical bandwidth. Consequently, fast raster scans generate distortions in the resulting image. We propose a smooth cycloid-like scan pattern th...
متن کاملAdaptive AFM scan speed control for high aspect ratio fast structure tracking.
Improved imaging rates in Atomic Force Microscopes (AFM) are of high interest for disciplines such as life sciences and failure analysis of semiconductor wafers, where the sample topology shows high aspect ratios. Also, fast imaging is necessary to cover a large surface under investigation in reasonable times. Since AFMs are composed of mechanical components, they are associated with comparably...
متن کاملHigh-speed adaptive optics line scan confocal retinal imaging for human eye
PURPOSE Continuous and rapid eye movement causes significant intraframe distortion in adaptive optics high resolution retinal imaging. To minimize this artifact, we developed a high speed adaptive optics line scan confocal retinal imaging system. METHODS A high speed line camera was employed to acquire retinal image and custom adaptive optics was developed to compensate the wave aberration of...
متن کاملVisual Measurement of Pile Penetration and Rebound Movement using a High-Speed Line-Scan Camera
When a construction company builds a high structure, many piles should be driven into the ground by a hammer whose weight is 7,000 Kg in order to make the ground under the structure safe and strong. So, it is essential to determine whether a pile is penetrated into the ground enough to support the weight of the structure since ground characteristics at different locations are different each oth...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: International Journal of Optomechatronics
سال: 2010
ISSN: 1559-9612,1559-9620
DOI: 10.1080/15599612.2010.484523